Microsystems Technology Laboratories

The Microsystems Technology Laboratories (MTL) is an interdepartmental laboratory with a mission to foster research and education in semiconductor process and device technology, and in integrated circuits and systems design. MTL provides microand nanofabrication and computer-aided design (CAD) infrastructure to the entire campus. MTL has 43 core faculty members who are engaged in diverse research areas related to electronic device fabrication, integrated circuits and systems, photonics, microelectromechanical systems (MEMS), and molecular and nanotechnologies. The most recent additions to MTL’s core membership include Polina Anikeeva, Department of Materials Science and Engineering (DMSE); Nicholas Fang, Department of Mechanical Engineering (DME); Silvija Gradečak, DMSE; Pablo Jarillo-Herrero, Department of Physics; William Tisdale, Department of Chemical Engineering; Kripa Varanasi, DME; Evelyn Wang, DME; and Michael Watts, Department of Electrical Engineering and Computer Science (EECS). In addition, 88 affiliate faculty and senior research staff benefit from the fabrication facilities and CAD infrastructure provided by MTL. Last year, more than 955 researchers, primarily graduate students from 35 departments, laboratories, and centers, conducted research using MTL’s advanced infrastructure (Figure 1). During FY2011, MTL recovered approximately 70% of operating expenses through charges to users and underwrote the remaining balance through unrestricted funds (approximately $1.45 million). Sponsored programs administered directly through MTL have an annual research volume of approximately $15.5 million.